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Design and control of a single-chip SOI-MEMS atomic force microscope
- Maroufi, Mohammad, Ruppert, Michael G., Fowler, Anthony G., Moheimani, S. O. Reza
On-chip dynamic mode atomic force microscopy: a silicon-on-insulator MEMS approach
- Ruppert, Michael G., Fowler, Anthony G., Maroufi, Mohammad, Moheimani, S. O. Reza
4-DOF SOI-MEMS ultrasonic energy harvester
- Fowler, Anthony G., Moheimani, S. O. Reza
A 4-DOF MEMS energy harvester using ultrasonic excitation
Internal model control for spiral trajectory tracking with MEMS AFM scanners
- Bazaei, Ali, Maroufi, Mohammad, Fowler, Anthony G., Moheimani, S. O. Reza
High-stroke silicon-on-insulator MEMS nanopositioner: control design for non-raster scan atomic force microscopy
- Maroufi, Mohammad, Fowler, Anthony G., Bazaei, Ali, Moheimani, S. O. Reza
MEMS nanopositioner for on-chip atomic force microscopy: a serial kinematic design
- Maroufi, Mohammad, Fowler, Anthony G., Reza Moheimani, S. O.
Note: a silicon-on-insulator microelectromechanical systems probe scanner for on-chip atomic force microscopy
- Fowler, Anthony G., Maroufi, Mohammad, Moheimani, S. O. Reza
Tracking of spiral trajectories beyond scanner resonance frequency by a MEMS nanopositioner
- Bazaei, Ali, Fowler, Anthony G., Maroufi, Mohammad, Moheimani, S. O. Reza
A feedback controlled MEMS nanopositioner for on-chip high-speed AFM
- Mohammadi, Ali, Fowler, Anthony G., Yong, Yuen K., Moheimani, S. O. Reza
An omnidirectional MEMS ultrasonic energy harvester for implanted devices
- Fowler, Anthony G., Moheimani, S. O. R., Behrens, Sam
Control of a novel 2-DoF MEMS nanopositioner with electrothermal actuation and sensing
- Rakotondrabe, Micky, Fowler, Anthony G., Moheimani, S. O. Reza
MEMS nanopositioner for Lissajous-scan atomic force microscopy
- Fowler, Anthony G., Maroufi, Mohammad, Bazaei, Ali, Moheimani, S. O. Reza
A MEMS electromagnetic energy harvester using ultrasonic excitation
- Fowler, Anthony G., Moheimani, S. O. Reza, Behrens, Sam
Closed-loop control of a novel 2-DOF MEMS nanopositioner with electrothermal actuation
- Fowler, Anthony G., Rakotondrabe, Micky, Moheimani, S. O. Reza
Design and analysis of nonuniformly shaped heaters for improved MEMS-based electrothermal displacement sensing
- Fowler, Anthony G., Bazaei, Ali, Moheimani, S. O. Reza
Design and characterization of a 2-DOF MEMS ultrasonic energy harvester with triangular electrostatic electrodes
A 3-DoF MEMS ultrasonic energy harvester
Characterization of a 2-DoF MEMS nanopositioner with integrated electrothermal actuation and sensing
Improved electrothermal position sensing in MEMS with non-uniformly shaped heaters
- Bazaei, Ali, Fowler, Anthony G., Moheimani, S. O. Reza
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